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Special Characteristics
Many microsensors, including biosensors
and chemical sensors, have the potential to be mass produced once the individual steps are
created. Thus, microfabrication techniques have become very important to sensor technology
as miniaturized, integrated systems have become possible. New instruments, such as ever
finer atomic force microscopes and derived instruments, involve such technologies and
create improvements to infrastructure for world class science. In the longer term, there
is a possibility of creating integrated computers and small machines for a variety of
applications.
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Worldview
The United States is the world leader in
microelectromechanical systems (MEMS)--miniature mechanical devices integrated with
microelectronic devices on the same substrate. Japan and Europe (Germany, Switzerland, the
Netherlands, and the United Kingdom) all have MEMS R&D programs, with Japan's being
the largest. Much of the Japanese research is geared toward medical and industrial
microdevice applications. MEMS is not limited to silicon micromachining but may also
include metallic and polymeric micromachining technologies as well as other
microelectronic fabrication techniques.
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